One of these new light-trapping concepts applies localized surface plasmon polariton (LSPP)-induced scattering of incident light at metal nanostructures. LSPP resonances denote coherent collective oscillations of the free electron gas in metal nanostructures embedded in a dielectric. At Ag nanoparticles or nanostructured Ag layers, light can couple efficiently to LSPP resonances.11 A subsequent radiative decay of plasmonic resonances, which dominates for large Ag nanostructures (radius ), can cause very efficient scattering of the incident light. This way, Ag nanostructures which exhibit LSPP resonances can serve as sub-wavelength scattering components that couple incident propagating light into thin a- or µc- absorber layers. Depending on the position of the Ag nanostructures within the layer stack of the solar cell, different concepts have been suggested in literature to make use of the LSPP-induced scattering. For example, Ag nanostructures placed at the front interface of solar cells have been proposed to reduce the initial reflection at the front interface of the solar cell.12 In between two component cells in a multijunction solar cell, LSPP-induced scattering at Ag nanoparticles can be used in an intermediate reflector to match the photocurrent of the single component solar cells.13 At the rear side of the solar cell, nanostructured Ag back contacts have been applied in order to scatter incident light such that the light is guided in the absorber layers of the solar cell.14–17 Regular arrangements of plasmonic nanostructures, which are also in the focus of this study, have been investigated for a- solar cells in the pioneering work of Ferry et al.14,15 Also for µc- solar cells a significant light-trapping potential has been identified in literature.10,18,19 In this contribution, such a regularly nanostructured back contact for µc- solar cells is investigated regarding its light-trapping effect and impact on the solar cell performance.