Parameterization of a-Si crystallization by continuous-wave green laser irradiation: from single spot to large area

David Munoz-Martin; Yu Chen; Miguel Morales; Juan José García-Ballesteros; Julio Cárabe; José Javier Gandía; José Domingo Santos; Maria Losurdo; Giovanni Bruno; Carlos Molpeceres

doi:10.1117/1.JPE.5.053086

24 November 2015 Parameterization of a-Si crystallization by continuous-wave green laser irradiation: from single spot to large area

David Munoz-Martin, Yu Chen, Miguel Morales, Juan José García-Ballesteros, Julio Cárabe, José Javier Gandía, José Domingo Santos, Maria Losurdo, Giovanni Bruno, Carlos Molpeceres

Author Affiliations +

Journal of Photonics for Energy, Vol. 5, Issue 1, 053086 (November 2015). https://doi.org/10.1117/1.JPE.5.053086

Abstract

An advantage of laser crystallization over conventional heating methods is its ability to limit rapid heating and cooling to thin surface layers. In the present work, thin-film amorphous-silicon samples were irradiated with a continuous-wave green laser source. Laser irradiated spots were produced by using different laser powers and irradiation times. Micro-Raman spectroscopy was used to study the crystallization induced on the irradiated surface. Both laser peak power density and irradiation time are identified as key variables in the crystallization process, but within the parametric window considered, the enhancement of the crystalline factor, is more sensitive to the power density than to the irradiation time. The optimum parameters are then used for crystallizing a large sample area by means of overlapped laser scanned lines. Ellipsometric data experimentally show that the whole volume of a micron-thick sample is crystallized.

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David Munoz-Martin, Yu Chen, Miguel Morales, Juan José García-Ballesteros, Julio Cárabe, José Javier Gandía, José Domingo Santos, Maria Losurdo, Giovanni Bruno, and Carlos Molpeceres "Parameterization of a-Si crystallization by continuous-wave green laser irradiation: from single spot to large area," Journal of Photonics for Energy 5(1), 053086 (24 November 2015). https://doi.org/10.1117/1.JPE.5.053086

Published: 24 November 2015

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