Paper
12 December 2018 Estimating relative extent of scattering loss due to sidewall roughness in slot waveguides by nw model
Yu Wang, Mei Kong
Author Affiliations +
Proceedings Volume 10848, Micro-Optics and MOEMS; 108480F (2018) https://doi.org/10.1117/12.2505594
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China
Abstract
We apply nw model to slot waveguides with three different cladding and filling materials and calculate nw at different structural parameters to reveal the influence of these parameters on the sidewall-roughness scattering loss. Based on the power density distribution and the mode field localization, we analyze the causes of the influence rules, which are also consistent with the trends of reported experimental data in literatures. The results of the calculation and analysis in this paper have a guiding significance for the design and processing of slot waveguides.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu Wang and Mei Kong "Estimating relative extent of scattering loss due to sidewall roughness in slot waveguides by nw model", Proc. SPIE 10848, Micro-Optics and MOEMS, 108480F (12 December 2018); https://doi.org/10.1117/12.2505594
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KEYWORDS
Waveguides

Silicon

Scattering

Refractive index

Cladding

Atomic layer deposition

Data modeling

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