Analysis of effects of retroreflector motion errors on measurement accuracy of a homodyne interferometer

Yindi Cai; Bo Xie; Yinghao Gao; Kuang-Chao Fan

doi:10.1117/12.2619985

9 December 2021 Analysis of effects of retroreflector motion errors on measurement accuracy of a homodyne interferometer

Yindi Cai, Bo Xie, Yinghao Gao, Kuang-Chao Fan

Author Affiliations +

Proceedings Volume 12030, Third International Conference on Optoelectronic Science and Materials (ICOSM 2021); 120302O (2021) https://doi.org/10.1117/12.2619985
Event: Third International Conference on Optoelectronic Science and Materials (ICOSM 2021), 2021, Hefei, China

Abstract

In this paper, the influences of the motion errors of the corner cube retroreflector, not only the pitch and yaw errors but also the straightness and roll errors, on the positioning measurement accuracy are comprehensively analyzed. An error compensation model for reducing the influences of the motion errors is proposed. In addition, the effects of the motion errors of corner cube retroreflector on the quality of the interference signals is also investigated. A series of experiments are carried out to verify the effectiveness of the proposed error compensation model.

Citation Download Citation

Yindi Cai, Bo Xie, Yinghao Gao, and Kuang-Chao Fan "Analysis of effects of retroreflector motion errors on measurement accuracy of a homodyne interferometer", Proc. SPIE 12030, Third International Conference on Optoelectronic Science and Materials (ICOSM 2021), 120302O (9 December 2021); https://doi.org/10.1117/12.2619985

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