Optimization of the post-deposition oxydation of chemical vapor deposition of W films for preparation of WO3 as an electrochromic material

D. S. Gogova; K. A. Gesheva; G. I. Stoyanov

doi:10.1117/12.185375

9 September 1994 Optimization of the post-deposition oxidation of CDV-W films for preparation of WO₃ as an electrochromic material

D. S. Gogova, K. A. Gesheva, G. I. Stoyanov

Author Affiliations +

Proceedings Volume 2255, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XIII; (1994) https://doi.org/10.1117/12.185375
Event: Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XIII, 1994, Freiburg, Germany

Abstract

This paper deals with preparation of WO₃ thin films and study of their optical and structural properties. Films were obtained using the following technological steps: first, the basic process is chemical vapor deposition (CVD) of W(CO)₆. When pyrolitical decomposition at 400 degree(s)C of this material takes place in Ar atmosphere W thin films on quartz substrate were obtained. This step was followed by hydrogen reduction at 740 degree(s)C and by further oxidizing process. Some of the as-deposited films were directly submitted to oxidizing process without heating in H₂ atmosphere. They are also WO₃ structures and exhibit good transmittance. Using integrated sphere Perkin-Elmer spectrophotometer we measured the spectral transmittance and reflectance in the range of the solar spectrum. Films have high transmittance reaching in some samples 80% and reflectance in the range from 20 to 40%. We studied the structure of W oxide films using Reflection high energy electron diffraction (RHEED) method. The d-spacing values show that as-prepared films are WO₃ structures.

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D. S. Gogova, K. A. Gesheva, and G. I. Stoyanov "Optimization of the post-deposition oxidation of CDV-W films for preparation of WO₃ as an electrochromic material", Proc. SPIE 2255, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XIII, (9 September 1994); https://doi.org/10.1117/12.185375

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