Metrology of etched quartz and chrome embedded phase shift gratings using scatterometry

Susan M. Wilson; S. Sohail H. Naqvi; John Robert McNeil; Herschel M. Marchman; Blaine D. Johs; Roger H. French; Franklin D. Kalk

doi:10.1117/12.209233

22 May 1995 Metrology of etched quartz and chrome embedded phase shift gratings using scatterometry

Susan M. Wilson, S. Sohail H. Naqvi, John Robert McNeil, Herschel M. Marchman, Blaine D. Johs, Roger H. French, Franklin D. Kalk

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Proceedings Volume 2439, Integrated Circuit Metrology, Inspection, and Process Control IX; (1995) https://doi.org/10.1117/12.209233
Event: SPIE's 1995 Symposium on Microlithography, 1995, Santa Clara, CA, United States

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Susan M. Wilson, S. Sohail H. Naqvi, John Robert McNeil, Herschel M. Marchman, Blaine D. Johs, Roger H. French, and Franklin D. Kalk "Metrology of etched quartz and chrome embedded phase shift gratings using scatterometry", Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); https://doi.org/10.1117/12.209233

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