Paper
1 September 1995 Light scattering from non-Gaussian surfaces
Eugene L. Church, Peter Z. Takacs
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Abstract
In the smooth-surface limit, the angular distribution of the intensity of light reflected and scattered from a rough surface depends only on the root-mean-square value of its surface roughness and is independent of the details of the distribution of the surface height fluctuations. In the case of rougher surfaces, the effects of the shape of the height distribution function which do appear are usually evaluated using an assumed Gaussian height distribution, even though real surfaces can be, and frequently are, non-Gaussian. This paper describes the results of an analytic study of the effects of non-Gaussian height distributions on the reflection and scattering properties of moderately-rough surfaces. As an example we compare predictions based on a Gaussian distribution with those of a one-sided exponential distribution. Large differences are found in and near the specular core, which eventually disappear in the scattering tail. Suggestions for follow-on experimental and analytic studies are given.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugene L. Church and Peter Z. Takacs "Light scattering from non-Gaussian surfaces", Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, (1 September 1995); https://doi.org/10.1117/12.218325
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Cited by 12 scholarly publications.
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KEYWORDS
Scattering

Light scattering

Surface roughness

Surface finishing

Signal processing

Critical dimension metrology

Laser scattering

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