Implementing surface photo-voltage in manufacturing

Martine Simard-Normandin

doi:10.1117/12.250932

13 September 1996 Implementing surface photo-voltage in manufacturing

Martine Simard-Normandin

Proceedings Volume 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III; (1996) https://doi.org/10.1117/12.250932
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

The acquisition of surface photo-voltage (SPV) instrument is only one step in the implementation of a metallic contamination reduction program. In order to take manufacturing decisions based on surface photo-voltage data, one must understand the strengths and limitations of the technique and avoid its pitfalls. We review the steps taken to implement SPV in our fab.

Citation Download Citation

Martine Simard-Normandin "Implementing surface photo-voltage in manufacturing", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); https://doi.org/10.1117/12.250932

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