Josephson junction fabricated by decanano technology using a focused ion beam

Youichi Enomoto; Shinichi Morohashi; Naoki Yutani; Katsu Ohnishi; Jianguo Wen

doi:10.1117/12.335894

22 December 1998 Josephson junction fabricated by decanano technology using a focused ion beam

Youichi Enomoto, Shinichi Morohashi, Naoki Yutani, Katsu Ohnishi, Jianguo Wen

Proceedings Volume 3481, Superconducting and Related Oxides: Physics and Nanoengineering III; (1998) https://doi.org/10.1117/12.335894
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

High-Tc Josephson junctions have been fabricated by a focused Ga-ion beam (FIB) with a full width of half maximum of 10 nm. Using two functions of etching and deposition, two types of the junction structures have been made on MgO and SrTiO₃ substrates. The first one is a grain boundary junction formed on the narrow modified area which is ion-irradiated on the substrate prior to film deposition. For this fabrication process, RSJ-type I-V characteristics are observed only on the MgO substrate. The Ic spread of working 30 junctions, (sigma) , is plus or minus 59% on the substrate of 1 cm². The second one is a proximity-effect junction with Au barrier layer. The tunneling area has been formed by etching and deposition technique of high-resolution FIB after film deposition. This junction also shows RSJ-type properties. The first type junctions are applied for some integrated circuits, using advantage of freedom of choice in the position of each junction with the high accuracy of the ion-beam control.

Citation Download Citation

Youichi Enomoto, Shinichi Morohashi, Naoki Yutani, Katsu Ohnishi, and Jianguo Wen "Josephson junction fabricated by decanano technology using a focused ion beam", Proc. SPIE 3481, Superconducting and Related Oxides: Physics and Nanoengineering III, (22 December 1998); https://doi.org/10.1117/12.335894

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available