Paper
18 November 1999 Fully automated membrane dispensing in nanoliter scale and its application in sensor manufacturing
Corinna Joergensen, Wolfgang Kuennecke
Author Affiliations +
Proceedings Volume 3857, Chemical Microsensors and Applications II; (1999) https://doi.org/10.1117/12.370288
Event: Photonics East '99, 1999, Boston, MA, United States
Abstract
The rising degree of miniaturization in sensor technology and the efforts to make industrial use of it require an adequate solution for coating of sensors with membranes needed for various applications. A fully automated dispensing device has been developed which is capable of dispensing droplets in nanoliter range with high accuracy and reproducibility. The device combines a three axles positioning system with a pattern recognition system and a dispensing value and is suited for industrial mass production of sensors. Up to 150 droplets per minute are possible. Positioning accuracy is below three micrometer and standard deviation of the dispensing process is 2% or lower. The reproducibility of the process is independent from properties of the medium to be dispensed such as viscosity or solvent and shows no dependence on dispensing parameters such as needle diameter or dispensing time. The measurement of dissolved oxygen in a liquid solution serves as application example to show the practical suitability of the dispensing device.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Corinna Joergensen and Wolfgang Kuennecke "Fully automated membrane dispensing in nanoliter scale and its application in sensor manufacturing", Proc. SPIE 3857, Chemical Microsensors and Applications II, (18 November 1999); https://doi.org/10.1117/12.370288
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Cited by 2 scholarly publications.
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KEYWORDS
Sensors

Oxygen

Liquids

Silicon

Electrodes

Silver

Semiconducting wafers

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