Paper
22 January 2005 Anodically bonded silicon-glass optical chip for biochemical sensing applications
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Abstract
In this communication, the compatibility of porous silicon and anodic bonding technologies for the realization of sensing microcomponents in lab-on-chip applications has been demonstrated. The two techniques have been combined for the fabrication of a microsensor with biological and chemical molecules sensing capability, in view of its miniaturization and integration with smart micro-dosage systems.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Luca De Stefano, Krzysztof Malecki, Luigi Moretti, and Ivo Rendina "Anodically bonded silicon-glass optical chip for biochemical sensing applications", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); https://doi.org/10.1117/12.591696
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Cited by 1 scholarly publication and 1 patent.
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KEYWORDS
Silicon

Glasses

Semiconducting wafers

Reflectivity

Electrodes

Refractive index

Optical microcavities

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