Substrate patterning for passive matrix organic light-emitting devices by photolithography processing

Jun Wang; Jun-sheng Yu; Hui Lin; Shuang-ling Lou; Ya-dong Jiang

doi:10.1117/12.782855

21 November 2007 Substrate patterning for passive matrix organic light-emitting devices by photolithography processing

Jun Wang, Jun-sheng Yu, Hui Lin, Shuang-ling Lou, Ya-dong Jiang

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67241E (2007) https://doi.org/10.1117/12.782855
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The fabrication technology of high resolution substrate pattern for organic light-emitting devices (OLEDs) was discussed in the paper. Surface morphology and crystallization properties of ITO films and the shape of photolithography pattern were investigated. Experimental results show that three factors including deposition pressure, flow ratio of argon to oxygen and annealing temperature greatly influence the conductance of ITO film.. Some attempts about designing photomask were enumerated and the reverse taper angle separator was successfully fabricated with image reversal process.

Citation Download Citation

Jun Wang, Jun-sheng Yu, Hui Lin, Shuang-ling Lou, and Ya-dong Jiang "Substrate patterning for passive matrix organic light-emitting devices by photolithography processing", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241E (21 November 2007); https://doi.org/10.1117/12.782855

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available