Fabrication and NO2 sensing properties of ChemFET sensors with self-assembly PAN/PSSA sensitive films based on nano-Au surface

Yadong Jiang; Huiling Tai; Guangzhong Xie; Junsheng Yu

doi:10.1117/12.792244

11 March 2008 Fabrication and NO₂ sensing properties of ChemFET sensors with self-assembly PAN/PSSA sensitive films based on nano-Au surface

Yadong Jiang, Huiling Tai, Guangzhong Xie, Junsheng Yu

Author Affiliations +

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69843Q (2008) https://doi.org/10.1117/12.792244
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Au colloids were synthesized using NaBH₄ or Na₃-sitrate with ethanol as solvent and nano-Au thin films were built up by the electrostatic self-assembly technique. The self-assembled polyaniline (PAN) and poly (styrenesulfonic acid) (PSSA) composite films (PAN/PSSA) were obtained by doping-induced deposition effect above the nano-Au film surface. A novel chemical field-effect transistor (ChemFET) gas sensor was designed and fabricated with PAN/PSSA composite films deposited on the gate area of MOSFET replacing the gate metal, and the gas-sensing properties of the ChemFET sensor to NO₂ was examined. The effects of the back-surface voltage and the channel length/width of ChemFET sensor on the gas-sensing characteristics were investigated. The results showed that Au colloids synthesized using ethanol as solvent was a monodisperse suspension and had more uniform distribution, and the PAN/PSSA composite film on the nano-Au film surface was uniform and firm. The optimum response of the ChemFET sensor could be obtained when the channel length and the ratio of channel width to channel length were 10μm and 10, respectively.

Citation Download Citation

Yadong Jiang, Huiling Tai, Guangzhong Xie, and Junsheng Yu "Fabrication and NO₂ sensing properties of ChemFET sensors with self-assembly PAN/PSSA sensitive films based on nano-Au surface", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843Q (11 March 2008); https://doi.org/10.1117/12.792244

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