Paper
5 May 2008 Using self-assembled nanoparticles to fabricate and optimize sub-wavelength textured structures in solar cells
D. H. Wan, H. L. Chen, C. C. Yu, Y. C. Lee
Author Affiliations +
Abstract
In this study, we demonstrated the textured structure on silicon surface by metal assisted etching method, using Au nanoparticles as catalysts in HF and H2O2 solution. The size and density of the nanoparticles could be tuned easily. The porous layers filled with cylinder- or cone-shaped were uniformly formed by immersing the gold deposited silicon wafers in a mixed solution containing HF and H2O2 under different etching conditions. The optimized textured structure was close-packed pyramids-like surface in subwavelength scale and showed the lowest reflectance less than 0.5% over whole visible and near IR wavelengths. The large reduction of reflectance was attributed from the gradient refractive index of the silicon surface with the depth along the light propagation.
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D. H. Wan, H. L. Chen, C. C. Yu, and Y. C. Lee "Using self-assembled nanoparticles to fabricate and optimize sub-wavelength textured structures in solar cells", Proc. SPIE 7002, Photonics for Solar Energy Systems II, 70020X (5 May 2008); https://doi.org/10.1117/12.781279
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KEYWORDS
Silicon

Nanoparticles

Gold

Etching

Semiconducting wafers

Reflectivity

Antireflective coatings

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