Micropatterning cathode separator for high resolution organic light-emitting diode with negative and positive type photoresists

Jun Wang; Junsheng Yu; Yadong Jiang; Kai Yuan

doi:10.1117/12.832085

18 May 2009 Micropatterning cathode separator for high resolution organic light-emitting diode with negative and positive type photoresists

Jun Wang, Junsheng Yu, Yadong Jiang, Kai Yuan

Author Affiliations +

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 72840Q (2009) https://doi.org/10.1117/12.832085
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Organic light emitting diodes (OLEDs) have been paid lots of attention for its potential lighting and display applications. The fabrication of separator to serve the metallic cathode effectively is a crucial process to obtain high resolution OLEDs display panel. In this work, both negative type photoresist photosensitive polyimide and positive photoresist AZ5214 with image reversal characteristic are used to fabricate the cathode separator with an easy-processing photolithography method. The exposure and developing process are simulated, and then the separator pattern with reversal trapezoid profile is fabricated for high resolution devices.

Citation Download Citation

Jun Wang, Junsheng Yu, Yadong Jiang, and Kai Yuan "Micropatterning cathode separator for high resolution organic light-emitting diode with negative and positive type photoresists", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840Q (18 May 2009); https://doi.org/10.1117/12.832085

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