Structural, surface, optical, and mechanical properties of Zn3N2 thin films prepared by sputtering deposition

Ting Wen; Nanke Jiang; Daniel G. Georgiev; Ahalapitiya H. Jayatissa

doi:10.1117/12.850844

28 April 2010 Structural, surface, optical, and mechanical properties of Zn₃N₂ thin films prepared by sputtering deposition

Ting Wen, Nanke Jiang, Daniel G. Georgiev, Ahalapitiya H. Jayatissa

Author Affiliations +

Proceedings Volume 7683, Energy Harvesting and Storage: Materials, Devices, and Applications; 768311 (2010) https://doi.org/10.1117/12.850844
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

Zinc nitride and zinc oxide can have wide range applications owing to their band-gap changes and controlling capability of n-type to p-type behavior by impurity doping. Thus, zinc oxy-nitrides can be utilized to design novel photonic devices such as solar cells, UV-Visible devices, and light emitting diodes. In this paper, feasibility of tuning the optical and electronic properties of zinc oxynitride thin films in an rf magnetron sputtering deposition. It was found that the change of gas composition such as Ar: N₂: O₂ can change the properties of zinc nitride films for a wide range. The absorption coefficient of zinc nitride films were larger than zinc oxide thin films in low photon energy range, in particular visible region of the spectrum. These results indicated that the zinc nitride may find suitable applications in solar cells and photonic devices.

Citation Download Citation

Ting Wen, Nanke Jiang, Daniel G. Georgiev, and Ahalapitiya H. Jayatissa "Structural, surface, optical, and mechanical properties of Zn₃N₂ thin films prepared by sputtering deposition", Proc. SPIE 7683, Energy Harvesting and Storage: Materials, Devices, and Applications, 768311 (28 April 2010); https://doi.org/10.1117/12.850844

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