All-solid-state thin film microbatteries fabricated by rf sputtering

J.K. Feng; M.O. Lai; Xianting Zeng; Zhaohong Huang; L. Lu

doi:10.1117/12.886251

17 May 2011 All-solid-state thin film microbatteries fabricated by rf sputtering

J.K. Feng, M.O. Lai, Xianting Zeng, Zhaohong Huang, L. Lu

Proceedings Volume 8035, Energy Harvesting and Storage: Materials, Devices, and Applications II; 80350E (2011) https://doi.org/10.1117/12.886251
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

Novel high power density cathode and anode materials for thin film battery are reported here. The layered Li(NiMnCo)_1/3O₂ film fabricated by sputtering shows a capacity as high as 190 mAhg^-1 in the range of 3-4.9 V and a capacity retention of 90% after 100 cycles. Novel oxide anode is synthesized by sputtering at room temperature, delivering a special capacity as high as 700 mAhg^-1 and a good capacity retention. The thin film battery using these materials shows a good cyclability and high rate ability.

Citation Download Citation

J.K. Feng, M.O. Lai, Xianting Zeng, Zhaohong Huang, and L. Lu "All-solid-state thin film microbatteries fabricated by rf sputtering", Proc. SPIE 8035, Energy Harvesting and Storage: Materials, Devices, and Applications II, 80350E (17 May 2011); https://doi.org/10.1117/12.886251

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