Two-cavity MEMS capacitive power scavenger

Jie Lin; Jianxiong Zhu; Zaichun Feng; Mahmoud Almasri

doi:10.1117/12.919501

24 May 2012 Two-cavity MEMS capacitive power scavenger

Jie Lin, Jianxiong Zhu, Zaichun Feng, Mahmoud Almasri

Proceedings Volume 8377, Energy Harvesting and Storage: Materials, Devices, and Applications III; 83770O (2012) https://doi.org/10.1117/12.919501
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

We have designed, modeled, fabricated and tested novel MEMS variable capacitors with two air cavities (two capacitors) for electrostatic power harvesting utilizing mechanical vibration in environment. The device is unique in the use of an innovative two-cavity design and electroplated nickel as the main structural material, which allows using both up and down directions to generate energy. The prototype of two-cavity MEMS variable capacitors have been successfully fabricated using surface micromachining. The initial testing for investigating electrical dynamic behaviors and power generation from the fabricated devices was implemented.

Citation Download Citation

Jie Lin, Jianxiong Zhu, Zaichun Feng, and Mahmoud Almasri "Two-cavity MEMS capacitive power scavenger", Proc. SPIE 8377, Energy Harvesting and Storage: Materials, Devices, and Applications III, 83770O (24 May 2012); https://doi.org/10.1117/12.919501

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