High efficient and ultra-precision machining of large scale SiC plane reflectors

Rui Guo; Ying Su; Chao-ping Chen; Yun-long Zhang; Feng Zhang; Xuan-min Liu

doi:10.1117/12.973661

16 October 2012 High efficient and ultra-precision machining of large scale SiC plane reflectors

Rui Guo, Ying Su, Chao-ping Chen, Yun-long Zhang, Feng Zhang, Xuan-min Liu

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84160X (2012) https://doi.org/10.1117/12.973661
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Based on the motion relationship of abrasive and workpiece, the abrasive kinds and the crucial parameters in rough lapping, fine lapping, rough polishing and fine polishing were established through a lot of technology experiments firstly in this work. The exploring experiments indicate the high quality surface of SiC plane reflector can be finished in short time. Secondly, the validation experiments were performed on the large scale SiC plane mirror with a size of 225×172 mm². As a result, the machining flow sheet was erected. Moreover, the machining tool, abrasive kinds, abrasive size, processing methods and testing solutions were all assembled in response to the flow sheet. The finished of 225×172 mm² SiC plane mirror was tested and evaluated. The results show that the surface figure error, i.e. PV, is 0.0117μm, and the surface roughness RMS is close to 0.68nm.

Citation Download Citation

Rui Guo, Ying Su, Chao-ping Chen, Yun-long Zhang, Feng Zhang, and Xuan-min Liu "High efficient and ultra-precision machining of large scale SiC plane reflectors", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84160X (16 October 2012); https://doi.org/10.1117/12.973661

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