Recent progress on the vacuum deposition of OLEDs with feature sizes ≤ 20 μm using a contact shadow mask patterned in-situ by laser ablation

Yoshitaka Kajiyama; Kevin Joseph; Koich Kajiyama; Syuji Kudo; Hany Aziz

doi:10.1117/12.2023308

27 September 2013 Recent progress on the vacuum deposition of OLEDs with feature sizes ≤ 20 μm using a contact shadow mask patterned in-situ by laser ablation

Yoshitaka Kajiyama, Kevin Joseph, Koich Kajiyama, Syuji Kudo, Hany Aziz

Author Affiliations +

Proceedings Volume 8829, Organic Light Emitting Materials and Devices XVII; 882919 (2013) https://doi.org/10.1117/12.2023308
Event: SPIE Organic Photonics + Electronics, 2013, San Diego, California, United States

Abstract

We report progress in the development of a new technique that has the potential to enable the vacuum deposition of OLEDs with feature sizes ≤ 20um, and hence high resolution OLED displays. An OLED device with 16um by 130um sub-pixel size has been successfully demonstrated utilizing the novel idea of the in-situ shadow mask patterning method showing the capability to achieve high resolution OLED patterning. In the approach proposed here, two sheets of polyimide film are mounted on the bottom electrode of an OLED. The top sheet of the two stacked sheets is patterned insitu by laser ablation to create apertures to function as a deposition shadow mask. The lower sheet, which serve as a protective layer to the electrode during the laser ablation step is then removed, and OLED materials are deposited through the now patterned top sheet. Since mask alignment is not required in this approach, the technique circumvents the resolution limitations imposed by the difficulty of aligning shadow masks in the conventional techniques, and allows achieving high resolution pixel patterning. Furthermore, shadow effects, another factor that limits resolution in conventional techniques, can be reduced due to the use of very thin polyimide film (~7.5um) that is directly held on the substrate by electrostatic force. In principle, by applying this technique to the standard three color side-by-side sub-pixel matrix scheme, a resolution and aperture ratio of 338ppi and 60%, respectively, can be expected, which is estimated based on the fact that the width of the deposited material is 25um for the 16um wide electrode.

Citation Download Citation

Yoshitaka Kajiyama, Kevin Joseph, Koich Kajiyama, Syuji Kudo, and Hany Aziz "Recent progress on the vacuum deposition of OLEDs with feature sizes ≤ 20 μm using a contact shadow mask patterned in-situ by laser ablation", Proc. SPIE 8829, Organic Light Emitting Materials and Devices XVII, 882919 (27 September 2013); https://doi.org/10.1117/12.2023308

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available