Optical Flatness Standard II: Reduction Of Interferograms

William Primak

doi:10.1117/12.947612

16 January 1989 Optical Flatness Standard II: Reduction Of Interferograms

William Primak

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947612
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

In [I], "Optical flatness standard," by W. Primak, published in Optical Enneerie 23(6), 806-61,5 (1984) , the ultimate precision of determining figures of optical flats was considered for an investigation of dimensional stability and stress relaxation, where any increase in precision of measurement is significant in shortening these investigations, usually extending over months and years. Although it might have been adequate to examine the contour along a single traverse, an attempt was made to combine such measurements to determine the figure of the whole surface in order to choose a traverse away from abrupt contour variations to avoid the errors of placement. With the equipment then at hand, it was difficult to handle more than a few traverses at a time. Now, with the advent of microcomputers with large memories and faster computational speeds, it has become practical to configure data loggers capable of handling data for the whole surface at once, thus greatly simplifying the task of combining the data for the interference patterns of sets of flats in pairs to determine their individual figures, and also giving access to a variety of methods. Several methods of reducing the interference patterns, including two using Fourier series expansions and one using substitution are given, and the problems of such determinations are discussed. A mathematical error in [I] is corrected.

Citation Download Citation

William Primak "Optical Flatness Standard II: Reduction Of Interferograms", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947612

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