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Jiali Zhu
at NanJing Normal University
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Author
Publications (1)
Proceedings Article | 2 June 2014 Paper
Optical fiber Fabry-Perot pressure sensor based on SU-8
Jiali Zhu, Lihua Dai, Ming Wang, Dongyan Cai, Hua Rong, Sheng Jia, Jingjing You
Proceedings Volume 9157, 915791 (2014) https://doi.org/10.1117/12.2058514
KEYWORDS: Sensors, Silicon, Optical fibers, Fabry–Perot interferometers, Photoresist materials, Semiconducting wafers, Microopto electromechanical systems, Lithography, Fiber optics sensors, Demodulation
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