Dr. Job Beckers
at Technische Univ. Eindhoven
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 129530E (2024) https://doi.org/10.1117/12.3009896
KEYWORDS: Particles, Plasma, Electrons, Adhesion, Scanners, Hydrogen, Extreme ultraviolet lithography, Ions, Stochastic processes, Particle contamination

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 1249631 (2023) https://doi.org/10.1117/12.2658259
KEYWORDS: Plasma, Particles, Electric fields, Simulations, Particle contamination, Contamination control, Contamination, Switching, Electrodes, Vacuum

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11609, 116091F (2021) https://doi.org/10.1117/12.2581666
KEYWORDS: Plasma, Particles, Hydrogen, Tin, Lead, Extreme ultraviolet lithography, Ions, Semiconducting wafers, Reticles, Extreme ultraviolet

Proceedings Article | 22 February 2021 Poster + Paper
Proceedings Volume 11611, 116113A (2021) https://doi.org/10.1117/12.2584607
KEYWORDS: Plasma, Particles, Contamination control, Particle contamination, Semiconductors, Extreme ultraviolet lithography, Contamination, Spherical lenses, Scanners, Robotics

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11323, 113232L (2020) https://doi.org/10.1117/12.2560192
KEYWORDS: Particles, Plasma, Contamination control, Extreme ultraviolet, Extreme ultraviolet lithography, Contamination, Scanners, Particle contamination, Electrons, Electrodes

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