Influeace Of System Aberrations On Interferometric Aspheric Surface Testing

Hiroyuki Kurita; Keisuke Saito; Masahiko Kato; Toyohiko Yatagai

doi:10.1117/12.939591

23 March 1987 Influeace Of System Aberrations On Interferometric Aspheric Surface Testing

Hiroyuki Kurita, Keisuke Saito, Masahiko Kato, Toyohiko Yatagai

Proceedings Volume 0680, Surface Characterization and Testing; (1987) https://doi.org/10.1117/12.939591
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Two important problems in interferometric aspheric surface testing are introduced and approaches for overcoming the problems are discussed. Firstly, the definition of the system aberrations of an optical system is given. The effect of system aberrations is explained by the result of computer simulations. An approach for the reduction of their influences using third order aberration representation of them is discussed. Secondly, the problem in the interpretation of an interferogram is discussed, and an interpretation method based on Huygens' principle is discussed. By the use of these methods, the influence of system aberration can be reduced, and the exact shape of aspheric surface to be tested can be obtained from the phase distributions measured.

Citation Download Citation

Hiroyuki Kurita, Keisuke Saito, Masahiko Kato, and Toyohiko Yatagai "Influeace Of System Aberrations On Interferometric Aspheric Surface Testing", Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); https://doi.org/10.1117/12.939591

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