Surface Roughness Evaluation By Image Analysis In Nomarski Dic Microscopy

M. J. Fairlie; J. G. Akkerman; R. S. Timsit; J. M. Zavislan

doi:10.1117/12.939848

20 April 1987 Surface Roughness Evaluation By Image Analysis In Nomarski Dic Microscopy

M. J. Fairlie, J. G. Akkerman, R. S. Timsit, J. M. Zavislan

Proceedings Volume 0749, Metrology: Figure and Finish; (1987) https://doi.org/10.1117/12.939848
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

A technique for evaluating surface microtopography is described which is based on the image analysis of optical micrographs yielded by Nomarski DIC microscopy. The technique evaluates slopes of surface asperities by calculating an intensity ratio of two Nomarski images of the same surface area. The images differ only in the intensity distribution across the microtopographical features as produced by different phase contrast conditions in the Nomarski optics. The image formed by calculating the intensity ratio on a pixel by pixel basis from the two corresponding DIC images is shown to be independent to first order of variations in sample reflectivity and sample illumination. Topographical data yielded by the present technique are compared with data obtained by commercially-available contact and optical profilometers.

Citation Download Citation

M. J. Fairlie, J. G. Akkerman, R. S. Timsit, and J. M. Zavislan "Surface Roughness Evaluation By Image Analysis In Nomarski Dic Microscopy", Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); https://doi.org/10.1117/12.939848

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