Enabling full field physics based OPC via dynamic model generation

Michael Lam; Chris Clifford; Ananthan Raghunathan; Germain Fenger; Kostas Adam

doi:10.1117/12.2261222

24 March 2017 Enabling full field physics based OPC via dynamic model generation

Michael Lam, Chris Clifford, Ananthan Raghunathan, Germain Fenger, Kostas Adam

Proceedings Volume 10143, Extreme Ultraviolet (EUV) Lithography VIII; 1014316 (2017) https://doi.org/10.1117/12.2261222
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

As EUV lithography marches closer to reality for high volume production, its peculiar modeling challenges related to both inter- and intra- field effects has necessitated building OPC infrastructure that operates with field position dependency. Previous state of the art approaches to modeling field dependency used piecewise constant models where static input models are assigned to specific x/y-positions within the field. OPC and simulation could assign the proper static model based on simulation-level placement. However, in the realm of 7nm and 5nm feature sizes, small discontinuities in OPC from piecewise constant model changes can cause unacceptable levels of EPE errors. The introduction of Dynamic Model Generation (DMG) can be shown to effectively avoid these dislocations by providing unique mask and optical models per simulation region, allowing a near continuum of models through field. DMG allows unique models for EMF, apodization, aberrations, etc to vary through the entire field and provides a capability to precisely and accurately model systematic field signatures.

Conference Presentation

Citation Download Citation

Michael Lam, Chris Clifford, Ananthan Raghunathan, Germain Fenger, and Kostas Adam "Enabling full field physics based OPC via dynamic model generation", Proc. SPIE 10143, Extreme Ultraviolet (EUV) Lithography VIII, 1014316 (24 March 2017); https://doi.org/10.1117/12.2261222

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available