Suppression of contrast-related artefacts in phase-measuring structured light techniques

Jan Burke; Liang Zhong

doi:10.1117/12.2269946

26 June 2017 Suppression of contrast-related artefacts in phase-measuring structured light techniques

Jan Burke, Liang Zhong

Author Affiliations +

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103290T (2017) https://doi.org/10.1117/12.2269946
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

Optical metrology using phase measurements has benefited significantly from the introduction of phase-shifting methods, first in interferometry, then also in fringe projection and fringe reflection. As opposed to interferometry, the latter two techniques generally use a spatiotemporal phase-shifting approach: A sequence of fringe patterns with varying spacing is used, and a phase map of each is generated by temporal phase shifting, to allow unique assignments of projector or screen pixels to camera pixels. One ubiquitous problem with phase-shifting structured-light techniques is that phase artefacts appear near regions of the image where the modulation amplitude of the projected or reflected fringes changes abruptly, e.g. near dirt/dust particles on the surface in deflectometry or bright-dark object colour transitions in fringe projection. Near the bright-dark boundaries, responses in the phase maps appear that are not plausible as actual surface features. The phenomenon has been known for a long time but is usually ignored because it does not compromise the overall reliability of results. In deflectometry, however, often the objective is to find and classify small defects, and of course it is then important to distinguish between bogus phase responses caused by fringe modulation changes, and actual surface defects. We present, for what we believe is the first time, an analytical derivation of the error terms, study the parameters influencing the phase artefacts (in particular the fringe period), and suggest some simple algorithms to minimise them.

Citation Download Citation

Jan Burke and Liang Zhong "Suppression of contrast-related artefacts in phase-measuring structured light techniques", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103290T (26 June 2017); https://doi.org/10.1117/12.2269946

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