Data preparation in the age of curvilinear patterns

Sébastien Bayle; Charles Tiphine; Matthieu Milléquant; Thiago Figueiro; Luc Martin; Sergei Postnikov; Patrick Schiavone

doi:10.1117/12.2280704

13 July 2017 Data preparation in the age of curvilinear patterns

Sébastien Bayle, Charles Tiphine, Matthieu Milléquant, Thiago Figueiro, Luc Martin, Sergei Postnikov, Patrick Schiavone

Proceedings Volume 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology; 104540H (2017) https://doi.org/10.1117/12.2280704
Event: Photomask Japan 2017, 2017, Yokohama, Japan

Abstract

The number of curvilinear patterns present on the masks will increase drastically in the next generations of semiconductor devices. Multibeam mask writers are foreseen to enable a more widespread use of curvilinear shapes. Several applications can benefit from curvilinear patterns like silicon photonics or Inverse Lithography Technology (ILT). We propose a set of innovative algorithms that uses a dedicated representation for curvilinear patterns. This approach simplifies the data handling and decreases file size by reducing the degree of freedom on the database. It also allows improving the output quality with a more precise control of the geometric correction. We illustrate the benefit of using the curvilinear data representation to the Mask Proximity correction and Mask Rule Check.

Citation Download Citation

Sébastien Bayle, Charles Tiphine, Matthieu Milléquant, Thiago Figueiro, Luc Martin, Sergei Postnikov, and Patrick Schiavone "Data preparation in the age of curvilinear patterns", Proc. SPIE 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology, 104540H (13 July 2017); https://doi.org/10.1117/12.2280704

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available