Fabrication of overlaid nanopattern arrays for plasmon memory

Takao Okabe; Hisahiro Wadayama; Jun Taniguchi

doi:10.1117/12.2281591

2 January 2018 Fabrication of overlaid nanopattern arrays for plasmon memory

Takao Okabe, Hisahiro Wadayama, Jun Taniguchi

Author Affiliations +

Proceedings Volume 10456, Nanophotonics Australasia 2017; 1045655 (2018) https://doi.org/10.1117/12.2281591
Event: SPIE Nanophotonics Australasia, 2017, Melbourne, Australia

Abstract

Stacking technique of nanopattern array is gathering attention to fabricate next generation data storage such as plasmon memory. This technique provides multi- overlaid nanopatterns which made by nanoimprint lithography. In the structure, several metal nanopatterned layer and resin layer as a spacer are overlaid alternately. The horizontal position of nanopatterns to under nanopatterns and thickness of resin layer as spacer should be controlled accurately, because these parameters affect reading performance and capacity of plasmon memory. In this study, we developed new alignment mark to fabricate multi- overlaid nanopatterns. The alignment accuracy with the order of 300 nm was demonstrated for Ag nanopatterns in 2 layers. The alignment mark can measure the thickness of spacer. The relationship of spacer thickness and position of scale bar on the alignment mark was measured. The usefulness of the alignment mark for highdensity plasmon memory is shown.

Citation Download Citation

Takao Okabe, Hisahiro Wadayama, and Jun Taniguchi "Fabrication of overlaid nanopattern arrays for plasmon memory", Proc. SPIE 10456, Nanophotonics Australasia 2017, 1045655 (2 January 2018); https://doi.org/10.1117/12.2281591

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Optical alignment

Nanostructures

Plasmons

Metals

Silver

Neodymium

Ultraviolet radiation

Show All Keywords

Keywords/Phrases

Search In:

Publication Years