Laser-induced forward transfer with optical stamp for high-quality film printing  (Conference Presentation)

Aiko Narazaki; Tadatake Sato; Hiroyuki Niino

doi:10.1117/12.2288695

14 March 2018 Laser-induced forward transfer with optical stamp for high-quality film printing (Conference Presentation)

Aiko Narazaki, Tadatake Sato, Hiroyuki Niino

Author Affiliations +

Proceedings Volume 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII; 105190O (2018) https://doi.org/10.1117/12.2288695
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

For high quality film printing, we have newly developed a laser-induced forward transfer with optical stamp (shortly, LIFTop), that consists of a two-step transfer process. In the first step, functional films were transferred onto a transparent polymer having high adhesiveness and elasticity like PDMS, which we call “optical stamp”. This stamp helps to avoid the transferred film from pattern spread and fracture. Then, the transferred micro-pattern on the optical stamp was further transferred onto a final target. In this talk, metal and transparent conductive oxide film transfer was demonstrated using our new LIFT process.

Conference Presentation

Citation Download Citation

Aiko Narazaki, Tadatake Sato, and Hiroyuki Niino "Laser-induced forward transfer with optical stamp for high-quality film printing (Conference Presentation)", Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105190O (14 March 2018); https://doi.org/10.1117/12.2288695

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