Innovative approaches for coordinate extraction of curved shape and analyzing the effect of process parameters on the quality of the laser micro-machined surface

S. Jagadeesh; H. Ebrahimi Orimi; S. Narayanswamy

doi:10.1117/12.2299388

19 February 2018 Innovative approaches for coordinate extraction of curved shape and analyzing the effect of process parameters on the quality of the laser micro-machined surface

S. Jagadeesh, H. Ebrahimi Orimi, S. Narayanswamy

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Proceedings Volume 10520, Laser-based Micro- and Nanoprocessing XII; 105201Y (2018) https://doi.org/10.1117/12.2299388
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

Laser micro machining is one of the micro manufacturing processes. Since it has wide range of applications in Microelectronics, medical device, aerospace etc., the accuracy of the process is the most significant factor. In this study, the challenges and corresponding possible solutions that are encountered in machining complex geometries are addressed. Furthermore, the effect of process parameters on the overall quality of the manufacturing are discussed. The paper proposes mathematical function based and image processing based algorithms to find the machining coordinates. The former calculates the first and second derivatives of the functions to find the essential coordinates and the latter converts pixels of the image into coordinates. Achieving required overlap is one of the difficulty in the curved shapes, which can be solved by using both the algorithms. However, the function-based approach is more efficient as the image processing approach depends on the image resolution. Lower resolution results in reduction in smoothness of the extracted coordinates and higher resolution leads to increased computational cost. By changing the different laser parameters such as laser power and mechanical parameters like sampling rate of data acquisition card; different roughness, depth and overlaps can be attained. The study demonstrates precision micromachining and it establishes optimal relation between the process parameters and quality of the machined surface.

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S. Jagadeesh, H. Ebrahimi Orimi, and S. Narayanswamy "Innovative approaches for coordinate extraction of curved shape and analyzing the effect of process parameters on the quality of the laser micro-machined surface", Proc. SPIE 10520, Laser-based Micro- and Nanoprocessing XII, 105201Y (19 February 2018); https://doi.org/10.1117/12.2299388

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KEYWORDS

Data acquisition

Image processing

Microfluidics

MATLAB

Image quality

Micromachining

Silicon

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