Integrated manufacturing flow for selective-etching SADP/SAQP

Rehab Kotb Ali; Ahmed Hamed Fatehy; James Word

doi:10.1117/12.2297415

20 March 2018 Integrated manufacturing flow for selective-etching SADP/SAQP

Rehab Kotb Ali, Ahmed Hamed Fatehy, James Word

Proceedings Volume 10588, Design-Process-Technology Co-optimization for Manufacturability XII; 105880Q (2018) https://doi.org/10.1117/12.2297415
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

Printing cut mask in SAMP (Self Aligned Multi Patterning) is very challenging at advanced nodes. One of the proposed solutions is to print the cut shapes selectively. Which means the design is decomposed into mandrel tracks, Mandrel cuts and non-Mandrel cuts. The mandrel and non-Mandrel cuts are mutually independent which results in relaxing spacing constrains and as a consequence more dense metal lines. In this paper, we proposed the manufacturing flow of selective etching process. The results are quantified in terms of measuring PVBand, EPE and the number of hard bridging and pinching across the layout.

Conference Presentation

Citation Download Citation

Rehab Kotb Ali, Ahmed Hamed Fatehy, and James Word "Integrated manufacturing flow for selective-etching SADP/SAQP", Proc. SPIE 10588, Design-Process-Technology Co-optimization for Manufacturability XII, 105880Q (20 March 2018); https://doi.org/10.1117/12.2297415

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available