Exploiting silicon oxycarbides for integrated photonic applications

Faisal Ahmed Memon; Francesco Morichetti; Andrea Melloni

doi:10.1117/12.2306624

17 May 2018 Exploiting silicon oxycarbides for integrated photonic applications

Faisal Ahmed Memon, Francesco Morichetti, Andrea Melloni

Author Affiliations +

Proceedings Volume 10683, Fiber Lasers and Glass Photonics: Materials through Applications; 106832T (2018) https://doi.org/10.1117/12.2306624
Event: SPIE Photonics Europe, 2018, Strasbourg, France

Abstract

We report on the characteristics of silicon oxycarbide films deposited by reactive radio frequency magnetron sputtering of a silicon carbide target in the presence of argon and oxygen gases. Quantitative characterization of the silicon oxycarbide films is performed extensively by ellipsometry, scanning electron microscopy and atomic force microscopy. Integrated photonic waveguides are demonstrated in silicon oxycarbide films.

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Faisal Ahmed Memon, Francesco Morichetti, and Andrea Melloni "Exploiting silicon oxycarbides for integrated photonic applications", Proc. SPIE 10683, Fiber Lasers and Glass Photonics: Materials through Applications, 106832T (17 May 2018); https://doi.org/10.1117/12.2306624

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