Enhanced far-UV reflectance of Al mirrors protected with hot-deposited MgF2

Luis Rodríguez-de Marcos; Nuria Gutiérrez-Luna; Lucía Espinosa-Yáñez; Carlos Honrado-Benítez; José Chavero-Royán; Belén Perea-Abarca; Juan I. Larruquert

doi:10.1117/12.2313635

5 June 2018 Enhanced far-UV reflectance of Al mirrors protected with hot-deposited MgF₂

Luis Rodríguez-de Marcos, Nuria Gutiérrez-Luna, Lucía Espinosa-Yáñez, Carlos Honrado-Benítez, José Chavero-Royán, Belén Perea-Abarca, Juan I. Larruquert

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Proceedings Volume 10691, Advances in Optical Thin Films VI; 106910T (2018) https://doi.org/10.1117/12.2313635
Event: SPIE Optical Systems Design, 2018, Frankfurt, Germany

Abstract

Mirrors based on Al protected with a MgF₂ film provide high reflectance over a broad spectral range down to the wavelength of 120 nm in the Far UV (FUV). After more than 50 years since the development of this technology, a significant FUV reflectance enhancement has been obtained in the last years. Such enhancement originates mostly in the higher transparency of the MgF₂ protective layer deposited on a hot Al-coated substrate. Research has been conducted at GOLD to measure the dependence of the FUV reflectance enhancement with MgF₂ deposition temperature. A reflectance enhancement was found for freshly-prepared samples; moreover, the reflectance degradation over time of Al films protected with hot-deposited MgF₂ was also smaller than for the coatings deposited at room temperature. A reflectance as high as 90% was measured at 121.6 nm (hydrogen Lyman α line) for aged samples. A FUV reflectance enhancement was also obtained on samples fully deposited at room temperature and later annealed in vacuum. The reflectance of Al mirrors as a function of MgF₂ deposition temperature, as well as of post-deposition annealed mirrors, and their stability over time is presented. Structural data on film roughness, density, and main crystal orientations for mirrors with a MgF₂ film deposited both at room temperature and at 250°C are also presented.

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Luis Rodríguez-de Marcos, Nuria Gutiérrez-Luna, Lucía Espinosa-Yáñez, Carlos Honrado-Benítez, José Chavero-Royán, Belén Perea-Abarca, and Juan I. Larruquert "Enhanced far-UV reflectance of Al mirrors protected with hot-deposited MgF₂", Proc. SPIE 10691, Advances in Optical Thin Films VI, 106910T (5 June 2018); https://doi.org/10.1117/12.2313635

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KEYWORDS

Reflectivity

Aluminum

Mirrors

Temperature metrology

Atomic force microscopy

X-rays

Absorption

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