AC dielectric properties of SiO2 thin layers implanted with In and Sb ions

Karolina Czarnacka; Tomasz N. Koltunowicz; Aleksander K. Fedotov

doi:10.1117/12.2501667

1 October 2018 AC dielectric properties of SiO₂ thin layers implanted with In and Sb ions

Karolina Czarnacka, Tomasz N. Koltunowicz, Aleksander K. Fedotov

Proceedings Volume 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018; 108085K (2018) https://doi.org/10.1117/12.2501667
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 2018, Wilga, Poland

Abstract

In this paper results of AC measurements of phase angle θ, capacity C_p and loss tangent tgδ dependences on frequency and temperature for InSb-SiO₂ nanocomposite, immediately after preparation are presented. The material was obtained by the implantation of In⁺ and Sb⁺ ions into a thin layer of SiO₂. Based on mathematical and physical calculations, frequency dependence of conductivity σ and relative permittivity ε_r were determined. Activation energy of electrons was also calculated. This work refers to the hopping mechanism of conductivity.

Citation Download Citation

Karolina Czarnacka, Tomasz N. Koltunowicz, and Aleksander K. Fedotov "AC dielectric properties of SiO₂ thin layers implanted with In and Sb ions", Proc. SPIE 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 108085K (1 October 2018); https://doi.org/10.1117/12.2501667

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