An accurate simulation algorithm for focus variation microscopy

Haihua Cui; Hao Wei; Xiaosheng Cheng; Xinguang Bian; Ning Dai

doi:10.1117/12.2500553

24 July 2018 An accurate simulation algorithm for focus variation microscopy

Haihua Cui, Hao Wei, Xiaosheng Cheng, Xinguang Bian, Ning Dai

Proceedings Volume 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018); 108270A (2018) https://doi.org/10.1117/12.2500553
Event: Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 2018, Shanghai, China

Abstract

The focus variation microscopy is widely used and researched in both industrial and academic field. But the 3D construction quality of surface topography is affected by the noise, the double peak value, and the discontinuous surface, and so on. A simulation method for focus variation is proposed based on the physical model of optical imaging and the Point Spread Model(PSF). At first, the linear relationship between the blur factor σ of Gaussian function and the defocus distance δ is deduced which is called point spread parameter λ, then, considering the positive correlation between blur factorσ and blur degree, the difference between the real defocused image and the calculated image by Gaussian convolution operation to real captured focused image is shown. It is used to the objective to computed the accurate value σ and the spread parameter λ. At last, the difference between focus measure valued of real image sequence and simulation image sequence is used to verify the method. The simulation method is a judgement basis for focus measurement, the single peak of focus curve, and the identification of high-frequency noise.

Citation Download Citation

Haihua Cui, Hao Wei, Xiaosheng Cheng, Xinguang Bian, and Ning Dai "An accurate simulation algorithm for focus variation microscopy", Proc. SPIE 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 108270A (24 July 2018); https://doi.org/10.1117/12.2500553

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KEYWORDS

Computer simulations

3D image processing

Microscopy

Optical imaging

Calibration

Point spread functions

3D metrology

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