Design of a miniature grating displacement sensor with large range

Jing Ma; Yuejing Qi; Zengxiong Lu

doi:10.1117/12.2506117

24 January 2019 Design of a miniature grating displacement sensor with large range

Jing Ma, Yuejing Qi, Zengxiong Lu

Proceedings Volume 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics; 108400V (2019) https://doi.org/10.1117/12.2506117
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Compared with laser interferometer, grating displacement sensor has the advantages of small size, low cost, and strong environmental robustness. In this paper, a grating displacement sensor was proposed. The theoretical model of the grating displacement sensor was established using the optical effect of Doppler shift and linearly polarized light interference. Based on this model, the error of the grating constant and the displacement of grating during measurement were analyzed to achieve the measurement accuracy of the grating displacement sensor. The analysis result showed that when the error of grating constant or the displacement of grating increases, the measurement accuracy will decrease. By changing the error of grating constant or the displacement of grating, 42 sets of measurement accuracy were calculated. The analysis result will provide an important reference for the development of nanometer accuracy grating displacement sensors.

Citation Download Citation

Jing Ma, Yuejing Qi, and Zengxiong Lu "Design of a miniature grating displacement sensor with large range", Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 108400V (24 January 2019); https://doi.org/10.1117/12.2506117

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