Plasmonic terahertz emitters with high-aspect ratio metal gratings

D. V. Lavrukhin; A. E. Yachmenev; I. A. Glinskiy; R. A. Khabibullin; M. Ryzhii; T. Otsuji; M. Shur; K. I. Zaytsev; D. S. Ponomarev

doi:10.1117/12.2521290

15 March 2019 Plasmonic terahertz emitters with high-aspect ratio metal gratings

D. V. Lavrukhin, A. E. Yachmenev, I. A. Glinskiy, R. A. Khabibullin, M. Ryzhii, T. Otsuji, M. Shur, K. I. Zaytsev, D. S. Ponomarev

Author Affiliations +

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 1102203 (2019) https://doi.org/10.1117/12.2521290
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

We propose a novel technology for fabricating plasmonic photoconductive antennas (PCAs) based on superlattice (SL) with increased height of the plasmonic gratings up to 100 nm. We passivate the surface of the SL by Si₃N₄, etch there windows and deposit Ti/Au antenna metallization. The plasmonic gratings are formed by electron-beam lithography with Ti/Au metallization followed by lift-off. Then an Al₂O₃ anti-reflection coating layer for reduction of the Fresnel reflection losses is used on the top of the plasmonic gratings, which also serves for maintaining its mechanical stability and providing the excitation of guided modes at the resonant wavelengths of the subwavelength slab waveguide formed by the metal gratings. Current-voltage measurements under femtosecond laser illumination reveal strong increase of the transient photocurrent generated by the fabricated plasmonic PCA which is 15 times higher than for conventional one (i.e. without the plasmonic gratings). The obtained terahertz (THz) power spectra demonstrate 100-times increase of the THz power in the plasmonic PCA. The results might be of interest to the needs of THz spectroscopy and imaging systems, in particular, operating with low-power lasers.

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D. V. Lavrukhin, A. E. Yachmenev, I. A. Glinskiy, R. A. Khabibullin, M. Ryzhii, T. Otsuji, M. Shur, K. I. Zaytsev, and D. S. Ponomarev "Plasmonic terahertz emitters with high-aspect ratio metal gratings", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102203 (15 March 2019); https://doi.org/10.1117/12.2521290

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KEYWORDS

Plasmonics

Principal component analysis

Terahertz radiation

Antennas

Metals

Silicon

Aluminum

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