Influence of annealing on nanocrystalline LiNbO3 films properties

Viktor S. Klimin; Zakhar E. Vakulov; Roman V. Tominov; Yuriy N. Varzarev; Iosif E. Clemente; Andrew V. Miakonkikh; Konstantin V. Rudenko; Oleg A. Ageev

doi:10.1117/12.2522316

15 March 2019 Influence of annealing on nanocrystalline LiNbO₃ films properties

Viktor S. Klimin, Zakhar E. Vakulov, Roman V. Tominov, Yuriy N. Varzarev, Iosif E. Clemente, Andrew V. Miakonkikh, Konstantin V. Rudenko, Oleg A. Ageev

Author Affiliations +

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110221E (2019) https://doi.org/10.1117/12.2522316
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

This work shows the results of studies on the effect of annealing on the properties of nanocrystalline LiNbO₃ films. Unannealed LiNbO₃ films are characterized by the formation of triangular grains and large droplets on the film surface. It has been shown that annealing in an oxygen atmosphere leads to significantly reducing the surface roughness of the films (from 63 to 47 nm) and the density of droplets on the LiNbO₃ film surface. It was established that annealing within 1 hour in oxygen atmosphere under temperature of 600°C allows increasing oxygen content in the film from 4.03 atm. % up to 11.02 atm. %. Using annealing made it possible to reduce the maximum value of absorption rate from 1.11 to 0.29. Obtained results can be used under development of energy converters and acousto-optic devices for use in electronics and medicine.

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Viktor S. Klimin, Zakhar E. Vakulov, Roman V. Tominov, Yuriy N. Varzarev, Iosif E. Clemente, Andrew V. Miakonkikh, Konstantin V. Rudenko, and Oleg A. Ageev "Influence of annealing on nanocrystalline LiNbO₃ films properties", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221E (15 March 2019); https://doi.org/10.1117/12.2522316

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