Spectrally-resolved white-light phase-shifted interferometry for 3D measurements of multilayer films

Young-Sik Ghim; Hyug-Gyo Rhee

doi:10.1117/12.2527587

21 June 2019 Spectrally-resolved white-light phase-shifted interferometry for 3D measurements of multilayer films

Young-Sik Ghim, Hyug-Gyo Rhee

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 1105631 (2019) https://doi.org/10.1117/12.2527587
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

As a summary of of the authors' previous paper of Ref 1, we describe a new scheme of a Linnik interferometric configuration based on spectrally-resolved white-light interferometry for simultaneous measurement of top surface and its underlying film surfaces in multilayer film structure. Our proposed technique enables accurate measurements of the phase and reflectance over a large range of wavelengths using the iterative least-squares phase-shifting algorithm by suppressing critical phase shift errors, and it provides a better measurement result than conventional methods. To verify our method a complex multilayer film was prepared and we measured it, and compared with well-known conventional techniques. Comparison results show our new method successfully works well with high precision as same as existing methods.

Citation Download Citation

Young-Sik Ghim and Hyug-Gyo Rhee "Spectrally-resolved white-light phase-shifted interferometry for 3D measurements of multilayer films", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 1105631 (21 June 2019); https://doi.org/10.1117/12.2527587

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