Research on the surface shape testing and close-loop performance of a deflectometry system

Yamin Zheng; Lei Huang; Chuang Sun; Licheng Sun; Shibing Lin

doi:10.1117/12.2528256

9 September 2019 Research on the surface shape testing and close-loop performance of a deflectometry system

Yamin Zheng, Lei Huang, Chuang Sun, Licheng Sun, Shibing Lin

Proceedings Volume 11107, Laser Beam Shaping XIX; 111070G (2019) https://doi.org/10.1117/12.2528256
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

The Shack-Hartmann wavefront sensor (SHWFS) is widely used in an adaptive optics (AO) system to measure the wavefront. The measurement accuracy of the SHWFS is limited by the micro-lens array, which is a core component of it. A deflectometry system (DS) is constructed to offer a high resolution measurement for the AO system, which could be used to test the surface shape of the deformable mirror (DM). The configuration and principle of the DS are presented. The surface shape testing and close-loop performance are analyzed in simulation and experiment. Results show that the DS has good ability in surface shape testing and close-loop correction.

Conference Presentation

Citation Download Citation

Yamin Zheng, Lei Huang, Chuang Sun, Licheng Sun, and Shibing Lin "Research on the surface shape testing and close-loop performance of a deflectometry system", Proc. SPIE 11107, Laser Beam Shaping XIX, 111070G (9 September 2019); https://doi.org/10.1117/12.2528256

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