Metrology Employing Deformable Optics (MEDO)

Burke E. Nelson; Dennis Mihora

doi:10.1117/12.955589

11 October 1989 Metrology Employing Deformable Optics (MEDO)

Burke E. Nelson, Dennis Mihora

Proceedings Volume 1113, Reflective Optics II; (1989) https://doi.org/10.1117/12.955589
Event: SPIE 1989 Technical Symposium on Aerospace Sensing, 1989, Orlando, FL, United States

Abstract

A technique is presented for the automated metrology of difficult to manufacture (large, highly aspheric, very precise) optics. This technique is termed MEDO- Metrology Employing Deformable Optics. It employs an Electrostatic Membrane Reflector (EMR) as the reference surface in a Twyman-Green interferometer, in combination with a commercially-available Phase Measuring Interferometer for automated data reduction. An analysis of the useful range of this proposed instrument indicates that it would, indeed, speed the production of many currently envisioned optics.

Citation Download Citation

Burke E. Nelson and Dennis Mihora "Metrology Employing Deformable Optics (MEDO)", Proc. SPIE 1113, Reflective Optics II, (11 October 1989); https://doi.org/10.1117/12.955589

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