Interferometric Extended Refractive Index Inhomogeneity Measurement Of Optical Glass

K. E. Elssner; R. Burow; R. Buthmann; J. Grzanna; A. Vogel

doi:10.1117/12.961320

3 April 1989 Interferometric Extended Refractive Index Inhomogeneity Measurement Of Optical Glass

K. E. Elssner, R. Burow, R. Buthmann, J. Grzanna, A. Vogel

Author Affiliations +

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961320
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

Automatic interferometry is employed for extended refractive index inhomogeneity measurement of optical glass disks intended e.g. for manufacturing lenses of microlithographic optical systems. The effect of stress birefringence of the glass on the measuring accuracy and the influence of an optical wedge on the imaging quality of a high performance optical system are examined.

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K. E. Elssner, R. Burow, R. Buthmann, J. Grzanna, and A. Vogel "Interferometric Extended Refractive Index Inhomogeneity Measurement Of Optical Glass", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961320

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