Scaling percussion drilling processes by ultrashort laser pulses using advanced beam shaping

D. Grossmann; D. Flamm; J. Hellstern; M. Sailer; M. Kumkar

doi:10.1117/12.2545065

2 March 2020 Scaling percussion drilling processes by ultrashort laser pulses using advanced beam shaping

D. Grossmann, D. Flamm, J. Hellstern, M. Sailer, M. Kumkar

Proceedings Volume 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV; 112670R (2020) https://doi.org/10.1117/12.2545065
Event: SPIE LASE, 2020, San Francisco, California, United States

Abstract

Drilling processes by ultrashort laser pulses meet the demand for high-end applications in the display and electronics industry. Especially the manufacturing of microstructures requires highest accuracy and minimal damage of the workpiece. A variety of applications, like the production of blind holes in multi-layer stacks or through holes in metal foils demand specific processing constraints. For example, applications like fine metal mask (FMM) require exact rectangular hole shape as well as tailored taper angles and minimized residual particle contamination. In large scale production environments, the total throughput also becomes decisive. To achieve these challenging needs, the spatial and temporal energy deposition are crucial parameters. In this context, beam shaping offers unique potential for controlling and scaling these micromachining processes. To pursue this approach, we present a novel adaptive beam shaping setup combined with a flexible TRUMPF TruMicro femtosecond laser. Our investigations target percussion drilling applications with various intensity distributions. We discuss methods for process optimization by controlling the spatial and temporal energy deposition. This enables us to analyze the correlation between micromachining results and the tailored absorption. Our investigations aim on shaping several beam properties like phase, amplitude, polarization and propagation characteristics using a liquid-crystal-on-silicon-spatial-light-modulator (LCOS-SLM). By correcting aberrations with a closed-loop setup, we generate robust process specific top-hat like intensity distributions.

Citation Download Citation

D. Grossmann, D. Flamm, J. Hellstern, M. Sailer, and M. Kumkar "Scaling percussion drilling processes by ultrashort laser pulses using advanced beam shaping", Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 112670R (2 March 2020); https://doi.org/10.1117/12.2545065

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available