Quasi-single-crystalline ZnGa2O4 films via solid-phase epitaxy for UV sensing (Conference Presentation)

Dong-Sing Wuu

doi:10.1117/12.2552200

10 March 2020 Quasi-single-crystalline ZnGa₂O₄ films via solid-phase epitaxy for UV sensing (Conference Presentation)

Dong-Sing Wuu

Proceedings Volume 11281, Oxide-based Materials and Devices XI; 112810T (2020) https://doi.org/10.1117/12.2552200
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

The ZnGa2O4 (ZGO) complex oxide with a wide bandgap of 5.1 eV has become one of the promising materials for deep ultraviolet sensing applications. However, the sputtered ZGO films always showed the disordered nanocrystalline structure resulting in the relatively poor performance. In this study, the solid-phase epitaxy method is used for crystallizing the ZGO structure via rapid thermal annealing (RTA) process. The disordered crystal-grains as incubated seeds are obtained in the as-deposited film at the substrate temperature of 400℃. By employing RTA at 700℃, the ZGO film structure approaches the quasi-single-crystalline structure, which is evidenced by checking the transmission electron microscopy. Suppression of the Zn diffusion out under the annealing will be discussed. As a result, the spectral responsivity of RTA-treated ZGO photodetector can reach 2.53 A W-1 at 240 nm and 5 V bias, indicating a relative enhancement of 256% as compared with the as-deposited one.

Conference Presentation

Citation Download Citation

Dong-Sing Wuu "Quasi-single-crystalline ZnGa₂O₄ films via solid-phase epitaxy for UV sensing (Conference Presentation)", Proc. SPIE 11281, Oxide-based Materials and Devices XI, 112810T (10 March 2020); https://doi.org/10.1117/12.2552200

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available