Fabrication of multi-layer micropillars array in micro-grooving technology

S. B. Xia; Y. B. He; S. J. Wang

doi:10.1117/12.2522649

6 January 2020 Fabrication of multi-layer micropillars array in micro-grooving technology

S. B. Xia, Y. B. He, S. J. Wang

Proceedings Volume 11383, Sixth Asia Pacific Conference on Optics Manufacture; 1138303 (2020) https://doi.org/10.1117/12.2522649
Event: Sixth Asia Pacific Conference on Optics Manufacture, 2019, Hong Kong, Hong Kong

Abstract

The micro-grooving technology/micro-ruling technology is a special and efficient manufacturing technology and generally used to machine the cylindrical surface and micro grooved structures array. This paper investigates the fabrication of different types of micro structures by ruling. Experiment is conducted to machine a multi-layer micropillar array with a sharp diamond cutting tool by micro-grooving. Experimental results show that micro-grooving technology is feasible for the machining of multi-layer micropillar array with submicrometer form accuracy.

Citation Download Citation

S. B. Xia, Y. B. He, and S. J. Wang "Fabrication of multi-layer micropillars array in micro-grooving technology", Proc. SPIE 11383, Sixth Asia Pacific Conference on Optics Manufacture, 1138303 (6 January 2020); https://doi.org/10.1117/12.2522649

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