Research on rapid repairing of surface laser damage of fused silica optics

Yaofei Zhang; Ci Song; Feng Shi; Ye Tian; Zhifan Lin

doi:10.1117/12.2553183

31 January 2020 Research on rapid repairing of surface laser damage of fused silica optics

Yaofei Zhang, Ci Song, Feng Shi, Ye Tian, Zhifan Lin

Proceedings Volume 11427, Second Target Recognition and Artificial Intelligence Summit Forum; 1142745 (2020) https://doi.org/10.1117/12.2553183
Event: Second Target Recognition and Artificial Intelligence Summit Forum, 2019, Changchun, China

Abstract

To realize the rapid repairing of surface damage of fused silica optics, a method combining magnetorheological and Computer controlled optical surface (CCOS) was proposed to quickly remove small size damage points on the surface of damaged fused silica optics. In this paper, the size and number of damage points on the surface of fused silica optics are analyzed. Meanwhile, the surface of the fused silica optics is evenly removed by the magnetorheological technology, and the change rule of damage points on the surface of fused silica optics is analyzed. After that, CCOS smoothing technology is used to restore the surface quality of the optics. The experimental results show that the combined technology can effectively remove the small size damage points on the surface of fused silica optics and maintain the surface quality of the optics, achieving a good repair effect.

Citation Download Citation

Yaofei Zhang, Ci Song, Feng Shi, Ye Tian, and Zhifan Lin "Research on rapid repairing of surface laser damage of fused silica optics", Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 1142745 (31 January 2020); https://doi.org/10.1117/12.2553183

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