Alexey M. Sakharov,1 Nikolay V. Baryshnikov,1 Valery E. Karasik,1 Julia V. Sheldakovahttps://orcid.org/0000-0002-5160-1194,2 Alexis Kudryashov,2,3 Alexander Nikitin2
1Bauman Moscow State Technical Univ. (Russian Federation) 2Institute for Dynamics of Geospheres (Russian Federation) 3Moscow Polytechnic Univ. (Russian Federation)
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We present a device using Shack-Hartmann wavefront sensor for measuring concave optical parts. A technique based on the device makes it easy to measure the main parameters of the aspherical equation of concave aspherical mirrors, radius of closest sphere Rv and eccentricity ε. The described method allows you to reconstruct the shape of the controlled surface in the form of an equation specified during its manufacture.
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Alexey M. Sakharov, Nikolay V. Baryshnikov, Valery E. Karasik, Julia V. Sheldakova, Alexis Kudryashov, Alexander Nikitin, "A method for reconstructing the equation of the aspherical surface of mirrors in an explicit form using a device with a wavefront sensor," Proc. SPIE 11487, Optical Manufacturing and Testing XIII, 114870B (20 August 2020); https://doi.org/10.1117/12.2569339