Determination of linewidth for metal/oxide gratings by measured diffraction efficiency in several orders

Dmitrij A. Belousov; Victor P. Korolkov; Ruslan V. Shimansky; Vladimir N. Khomutov; Roman I. Kuts

doi:10.1117/12.2574002

10 October 2020 Determination of linewidth for metal/oxide gratings by measured diffraction efficiency in several orders

Dmitrij A. Belousov, Victor P. Korolkov, Ruslan V. Shimansky, Vladimir N. Khomutov, Roman I. Kuts

Author Affiliations +

Proceedings Volume 11551, Holography, Diffractive Optics, and Applications X; 115511N (2020) https://doi.org/10.1117/12.2574002
Event: SPIE/COS Photonics Asia, 2020, Online Only

Conference Poster

Abstract

The algorithm for estimating the linewidth for metal oxide grating embedded in the grooves of metal grating by analyzing diffractometric measurements in transmitted and reflected light are considered. To calculate the diffraction efficiency under of rigorous electromagnetic theory, the developed algorithm uses the functions of the GD-Calc toolkit. The estimation of the linewidth from the diffraction efficiency analysis for 1μm period of the grating formed on a Ti film has demonstrated discrepancy near 5% with result obtained from analysis microimages.

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Dmitrij A. Belousov, Victor P. Korolkov, Ruslan V. Shimansky, Vladimir N. Khomutov, and Roman I. Kuts "Determination of linewidth for metal/oxide gratings by measured diffraction efficiency in several orders", Proc. SPIE 11551, Holography, Diffractive Optics, and Applications X, 115511N (10 October 2020); https://doi.org/10.1117/12.2574002

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