Precision Electrodisplacive Microactuators

Mark A. Ealey

doi:10.1117/12.962931

9 November 1989 Precision Electrodisplacive Microactuators

Mark A. Ealey

Proceedings Volume 1167, Precision Engineering and Optomechanics; (1989) https://doi.org/10.1117/12.962931
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

With the advent of "smart structures", a new generation of microactuators and microsensors are required to perform the sensing and micromanipulation functions on micrometer dimensions. Litton/Itek Optical Systems has pioneered the development of precision displacement actuators fabricated from the electroceramic lead-magnesium-niobate (PMN) for the past decade. Both conventional tape cast and advanced photolithographic techniques have been utilized to extend the PMN electroceramic technology to the realm of the microactuator. The microactuators have been fabricated in small sizes, batch processed, and deposited onto PMN substrates. The actuators have produced unsurpassed displacement resolution, set-point accuracy, and dynamic response. More specifically, PMN is a unique point-of-departure material which exhibits negligible hysteresis, a low coefficient of thermal expansion, low power dissipation, and large electrostrains, all important parameters for precision displacement transducers.

Citation Download Citation

Mark A. Ealey "Precision Electrodisplacive Microactuators", Proc. SPIE 1167, Precision Engineering and Optomechanics, (9 November 1989); https://doi.org/10.1117/12.962931

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available